Posts for Microfabrication

Indirect Mask Alignment

Tue, Dec 5, 2017, ~500 Words

Determining alignment tolerances between directly aligned layers is, well, direct. These tolerances will be set by equipment capability. However, unless you are planning to measure O(n²) values, indirect alignment tolerances require a little calculation. Unfortunately, I have seen this done incorrectly, using the root-mean-square (RMS) value.

Tags: microfabrication

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